PVD wafer automatic loading and unloading
-Wafer detection Mapping system
-Automatic disk edge finding system
-Automatic wafer loading and unloading system
-Yield rate≥99.5%
-Wafer loading capacity：288pcs/h
-Robots certified for use in a dust-free environment, meeting national cleanliness requirements
-Equipped with high-speed I/O for wafer mapping inspection
-High stability ensures gentle wafer handling and tray placement without collisions
-High Position Repeatability (Position repeatability: 0.02mm), ensuring damage-free during wafer loading and unloading
-Jitter-free in high-speed wafer handling for efficient loading and unloading
-High flexibility, compatibility, stability and ease of operation
上海捷勃特機(jī)器人有限公司 
滬ICP備2020034948號-2
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